Innovion Implant Center

This 58,000 sf manufacturing facility handles ion implantation on silicon wafers. Our scope included the entire build-out, including process mechanical and electrical systems, clean rooms, offices and the exterior utility yard. The facility was prepared to house nine ion implanters with additional capacity for up to 30. One significant challenge involved upgrading the existing warehouse building to withstand the loads imposed by the new rooftop mechanical equipment and the extensive array of roof-supported MEP pipe racks.